Tutorial: Piezoelectric and magnetoelectric N/MEMS—Materials, devices, and applications

Nano- and micro-electromechanical systems (N/MEMSs) are traditionally based on electrostatic or piezoelectric coupling, which couples electrical mechanical energy through acoustic resonator structures. Most recently, N/MEMS devices magnetoelectrics gaining much attention. Unlike that rely an AC electric field voltage excitation, magnetoelecric the electromechanical resonance of a magnetostrictive/piezoelectric bilayer heterostructure exhibiting strong strain-mediated magnetoelectric coupling under excitation magnetic and/or field. As consequence, enable unprecedented new applications, ranging from sensors, ultra-compact antennas, etc. This Tutorial will first outline fundamental principles materials, design, specifically different modes, piezoelectric-based i.e., radio frequency front end filters infrared radiation sensors. We then provide overview materials focusing governing physics effect, material properties for achieving high state-of-the-art devices, their respective applications.